Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices |
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| Editor:
| Garfunkel, Eric
Gusev, Evgeni
Vul', Alexander |
| Series title: | NATO Science Partnership Subseries: 3 Ser. |
| ISBN: | 978-0-7923-5008-8 |
| Publication Date: | Mar 1998 |
| Publisher: | Springer Netherlands
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| Imprint: | Springer |
| Book Format: | Paperback |
| List Price: | USD $179.99USD $169.99 |
Book Description:
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Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997
Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997