Semiconductor Sensors |
|
| Editor:
| Sze, Simon M. |
| ISBN: | 978-0-471-54609-2 |
| Publication Date: | Oct 1994 |
| Publisher: | John Wiley & Sons, Incorporated
|
| Imprint: | Wiley-Interscience |
| Book Format: | Hardback |
| List Price: | USD $244.95 |
Book Description:
|
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors.